Advanced scanning probe lithography using anatase-to-rutile transition to create localized TiO₂ nanorods

• Julian Kalb,
• Vanessa Knittel and
• Lukas Schmidt-Mende

Beilstein J. Nanotechnol. 2019, 10, 412–418, doi:10.3762/bjnano.10.40

• cantilever arrays [47]. Besides these technically challenges, there are some clear advantages of this method. First, it works under ambient conditions, and the setup is inexpensive compared to electron-beam lithography. Nevertheless, the resolution is roughly of the same order of magnitude. Second, it is a

Multimodal cantilevers with novel piezoelectric layer topology for sensitivity enhancement

• Steven Ian Moore,
• Michael G. Ruppert and
• Yuen Kuan Yong

Beilstein J. Nanotechnol. 2017, 8, 358–371, doi:10.3762/bjnano.8.38

• characteristics compared to the optical beam deflection method. The possibility of down scaling, parallelization of cantilever arrays and the absence of optical interference associated imaging artifacts have led to an increased research interest in these methods. However, for multifrequency AFM, the optimization

• strain-based deflection measurement offers several advantages including a much more compact measurement setup, potential for scalability to cantilever arrays as well as increased sensitivity for smaller cantilever dimensions [34][35][36][37][38]. Among the existing integrated actuation and sensing

Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

• Christian Ganser,
• Gerhard Fritz-Popovski,
• Roland Morak,
• Parvin Sharifi,
• Benedetta Marmiroli,
• Barbara Sartori,
• Heinz Amenitsch,
• Thomas Griesser,
• Christian Teichert and
• Oskar Paris

Beilstein J. Nanotechnol. 2016, 7, 637–644, doi:10.3762/bjnano.7.56

• instance, to detect molecules adsorbing on the cantilever surface by simply reading out the deflection of a chemically modified cantilever [1]. In order to differentiate a spectrum of molecules, cantilever arrays were used to create an artificial “chemical nose”, leading to sensor systems which are able to

• . Within certain limits, all the mentioned parameters may be varied to quantitatively control the deflection of the presented simple bilayer actuator in order to tailor its response to a humidity change. In combination with cantilever arrays, this concept could be used for complex, humidity-controlled

Nanomechanical humidity detection through porous alumina cantilevers

• Olga Boytsova,
• Alexey Klimenko,
• Vasiliy Lebedev,
• Alexey Lukashin and
• Andrey Eliseev

Beilstein J. Nanotechnol. 2015, 6, 1332–1337, doi:10.3762/bjnano.6.137

• behavior of the resonance frequency of porous anodic alumina cantilever arrays during water vapor adsorption and emphasize their possible use in the micromechanical sensing of humidity levels at least in the range of 10–22%. The sensitivity of porous anodic aluminium oxide cantilevers (Δf/Δm) and the

• humidity sensitivity equal about 56 Hz/pg and about 100 Hz/%, respectively. The approach presented here for the design of anodic alumina cantilever arrays by the combination of anodic oxidation and photolithography enables easy control over porosity, surface area, geometric and mechanical characteristics

• of the cantilever arrays for micromechanical sensing. Keywords: anodic aluminium oxide; atomic force microscopy (AFM); cantilever arrays; humidity; mechanical sensor; porous alumina; Introduction The last two decades have seen a surge in resonant micro- and nanomechanical engineering raised by the

Porous polymer coatings as substrates for the formation of high-fidelity micropatterns by quill-like pens

• Michael Hirtz,
• Marcus Lyon,
• Wenqian Feng,
• Andrea E. Holmes,
• Harald Fuchs and
• Pavel A. Levkin

Beilstein J. Nanotechnol. 2013, 4, 377–384, doi:10.3762/bjnano.4.44

• minute. However, technically the writing speed can be increased by the use of cantilever arrays, with the added option of intrinsic multiplexing [10]. Comparison of substrates First, we compared four different substrate systems (i.e., plain paper, nylon membrane, nitrocellulose, and a HEMA porous polymer